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Instruments Center / Mask Aligner

  

貴儀名稱

微影曝光系統

Mask Aligner

儀器說明

儀器購置年月:92  4 
廠牌及型號 Karl Suss
    1um解析度、接觸式或近接式曝光、2.5吋晶圓尺寸

保管人

施明昌老師

服務項目

微影光阻曝光

貴儀圖片

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