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Instruments Center / Surface Profiler

  

貴儀名稱

膜厚掃瞄機   Surface Profiler

儀器說明

1.   儀器購置年月:92  4 

2.   廠牌及型號 Tencor Alpha Step 500

3.       Scan Length 10mm~2mm

4.   Sample Rate 500100 or 200Hz

保管人

施明昌老師

服務項目

半導體元件薄膜厚度及表面輪廓量測

貴儀圖片

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