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Journal paper
Date of publication2008-11-00
Journal levelSCI / 其他
Paper title (chapter)Significantly improving sub-90 nm CMOSFET performances with notch-gate enhanced high tensile-stress contact etch stop layer
Name of journalMicroelectronics Reliability
number of chapters48
Issue No.11-12
起頁1791
迄頁1794
Total number of pages4
Name of author (Chinese)Wen-Kuan Yeh
Name of author (English)Wen-Kuan Yeh
AuthorsChia-Wei Hsu, Yean-Kuen Fang, Wen-Kuan Yeh, and Chien-Ting Lin
Number of authors4
Author's typeCorresponding Author
Language usedEnglish

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