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Journal paper
Date of publication2006-12-00
Journal levelSCI / EI
Paper title (chapter)Effect of Silicon Thickness on Contact-Etch-Stop-Layer-Induced Silicon/Buried-Oxide Interface Stress for Partially Depleted SOI
Name of journalIEEE Electron Device Letters
number of chapters27
Issue No.12
起頁963
迄頁965
Total number of pages3
Name of author (Chinese)Wen-Kuan Yeh
Name of author (English)Wen-Kuan Yeh
AuthorsChien-Ting Lin, Yean-Kuen Fang, Wen-Kuan Yeh, Tung-Hsing Lee, Ming-Shing Chen, Che-Hua Hsu, Liang-Wei Chen, Li-Wei Cheng, and Mike Ma
Number of authors9
Author's typeCorresponding Author
Language usedEnglish

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