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Journal paper
Date of publication2006-11-00
Journal levelSCI
Paper title (chapter)The Geometry Effect of Contact Etch Stop Layer Impact on Device Performance and Reliability for 90-nm SOI nMOSFETs
Name of journalIEEE Transactions on Electron Devices
number of chapters53
Issue No.11
起頁2779
迄頁2785
Total number of pages7
Name of author (Chinese)Wen-Kuan Yeh
Name of author (English)Wen-Kuan Yeh
AuthorsChieh-Ming Lai, Yean-Kuen Fang, Chien-Ting Lin, and Wen-Kuan Yeh
Number of authors4
Author's typeCorresponding Author
Language usedEnglish

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