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Journal paper
Date of publication2010-08-00
Journal levelSCI / EI
Paper title (chapter)External Stresses on Tensile and Compressive Contact Etching Stop Layer SOI MOSFETs
Name of journalIEEE Transactions on Electron Devices
number of chapters57
Issue No.8
起頁1889
迄頁1894
Total number of pages6
Name of author (Chinese)Wen-Kuan Yeh
Name of author (English)Wen-Kuan Yeh
AuthorsWen-Teng Chang,Chih-Chung Wang(王治忠),Jian-An Lin(林建安),and Wen-Kuan Yeh
Number of authors4
Author's typeCorresponding Author
Reference URLhttp://ieeexplore.ieee.org/search/freesrchabstract.jsp?tp=&arnumber=5497124&queryText%3DExternal+Stresses+on+Tensile+and+Compressive+Contact+Etching+Stop+Layer+SOI+MOSFETs%26openedRefinements%3D*%26searchField%3DSearch+All
Language usedEnglish

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