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Journal paper
Date of publication2010-02-00
Journal level其他
Paper title (chapter)雷射光學麥克生干涉圖紋之解析能力及薄膜表面檢測技術
Name of journal機械工業雜誌
number of chapters.
Issue No.第323期
起頁95
迄頁102
Total number of pages8
Name of author (Chinese)Ming-Chang Shih
Name of author (English)Ming-Chang Shih
Authors施明昌, 陳正森, 王雍行, 張裕修, 洪基彬
Number of authors5
Author's typeFirst Author
Language usedChinese

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