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Journal paper
Date of publication2008-02-00
Journal levelSCI
Paper title (chapter)Deposition of Aluminum Nitride Thin Film on Si (111) by KrF Excimer Laser and its Characterizations
Name of journalApplied Surface Science
number of chaptersvol.254
Issue No.no.8
起頁2211
迄頁2215
Total number of pages5
Name of author (Chinese)Ming-Chang Shih
Name of author (English)Ming-Chang Shih
AuthorsMing Chang Shih, Chi-Wei Liang, Ping-Ju Chaing
Number of authors3
Author's typeFirst Author
Language usedEnglish

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