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| Date of publication | 2010-08-00 |
|---|---|
| Journal level | SCI |
| Paper title (chapter) | External Stresses on Tensile and Compressive Contact Etching Stop Layer SOI MOSFETs |
| Name of journal | IEEE Transactions on Electron Devices |
| number of chapters | Vol.57 |
| Issue No. | No.8 |
| 起頁 | 1889 |
| 迄頁 | 1894 |
| Total number of pages | 6 |
| Name of author (Chinese) | Wen-Teng Chang |
| Name of author (English) | Wen-Teng Chang |
| Authors | Wen-Teng Chang, Chih-Chung Wang, Jian-An Lin, Wen-Kuan Yeh |
| Number of authors | 4 |
| Author's type | First Author / Corresponding Author |
| ISSN(ISBN) | 0018-9383 |
| Reference URL | http://ieeexplore.ieee.org/Xplore/login.jsp?url=http%3A%2F%2Fieeexplore.ieee.org%2Fiel5%2F16%2F5518459%2F05497124.pdf%3Farnumber%3D5497124&authDecision=-203 |
| Language used | English |
