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Journal paper
Date of publication2010-08-00
Journal levelSCI
Paper title (chapter)External Stresses on Tensile and Compressive Contact Etching Stop Layer SOI MOSFETs
Name of journalIEEE Transactions on Electron Devices
number of chaptersVol.57
Issue No.No.8
起頁1889
迄頁1894
Total number of pages6
Name of author (Chinese)Wen-Teng Chang
Name of author (English)Wen-Teng Chang
AuthorsWen-Teng Chang, Chih-Chung Wang, Jian-An Lin, Wen-Kuan Yeh
Number of authors4
Author's typeFirst Author / Corresponding Author
ISSN(ISBN)0018-9383
Reference URLhttp://ieeexplore.ieee.org/Xplore/login.jsp?url=http%3A%2F%2Fieeexplore.ieee.org%2Fiel5%2F16%2F5518459%2F05497124.pdf%3Farnumber%3D5497124&authDecision=-203
Language usedEnglish

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