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Journal paper
Date of publication2010-02-00
Journal levelSCI
Paper title (chapter)Solid Internal Energy Dissipation of 3C Single-Crystal Silicon Carbide Micromechanical Resonators by Heterojunction Growth on Silicon
Name of journalSensors and Materials
number of chaptersVol.22
Issue No.No.2
起頁71
迄頁83
Total number of pages13
Name of author (Chinese)Wen-Teng Chang
Name of author (English)Wen-Teng Chang
AuthorsWenteng Chang
Number of authors1
Author's typeFirst Author / Corresponding Author
ISSN(ISBN)0914-4935
Reference URLhttp://www.myu-inc.jp/myukk/S&M/
Language usedEnglish

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