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Journal paper
Date of publication2011-03-10
Journal levelSCI
Paper title (chapter)Clamping Losses of Folded- and Straight-Beam MEMS Resonators Made from Polycrystalline 3C-SiC Films
Name of journalInternational Journal of Modern Physics B
number of chapters25
Issue No.6
起頁885
迄頁896
Total number of pages12
Name of author (Chinese)Wen-Teng Chang
Name of author (English)Wen-Teng Chang
AuthorsWen-Teng Chang
Number of authors1
Author's typeFirst Author / Corresponding Author
ISSN(ISBN)0217-9792
Language usedEnglish

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