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Date of publication | 2009-04-07 |
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Journal level | SCI |
Paper title (chapter) | Grain size control of (111) polycrystalline 3C-SiC films by doping used as folded-beam MEMS resonators for energy dissipation |
Name of journal | Microsystem Technologies |
number of chapters | Vol.15 |
Issue No. | No.6 |
起頁 | 875 |
迄頁 | 880 |
Total number of pages | 6 |
Name of author (Chinese) | Wen-Teng Chang |
Name of author (English) | Wen-Teng Chang |
Authors | Wenteng Chang, Christian Zorman |
Number of authors | 2 |
Author's type | First Author / Corresponding Author |
ISSN(ISBN) | 1432-1858 |
Reference URL | http://www.springerlink.com/content/40k5t3073r7n4826/ |
Language used | English |