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| Date of publication | 2009-04-07 |
|---|---|
| Journal level | SCI |
| Paper title (chapter) | Grain size control of (111) polycrystalline 3C-SiC films by doping used as folded-beam MEMS resonators for energy dissipation |
| Name of journal | Microsystem Technologies |
| number of chapters | Vol.15 |
| Issue No. | No.6 |
| 起頁 | 875 |
| 迄頁 | 880 |
| Total number of pages | 6 |
| Name of author (Chinese) | Wen-Teng Chang |
| Name of author (English) | Wen-Teng Chang |
| Authors | Wenteng Chang, Christian Zorman |
| Number of authors | 2 |
| Author's type | First Author / Corresponding Author |
| ISSN(ISBN) | 1432-1858 |
| Reference URL | http://www.springerlink.com/content/40k5t3073r7n4826/ |
| Language used | English |
