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Journal paper
Date of publication2009-04-07
Journal levelSCI
Paper title (chapter)Grain size control of (111) polycrystalline 3C-SiC films by doping used as folded-beam MEMS resonators for energy dissipation
Name of journalMicrosystem Technologies
number of chaptersVol.15
Issue No.No.6
起頁875
迄頁880
Total number of pages6
Name of author (Chinese)Wen-Teng Chang
Name of author (English)Wen-Teng Chang
AuthorsWenteng Chang, Christian Zorman
Number of authors2
Author's typeFirst Author / Corresponding Author
ISSN(ISBN)1432-1858
Reference URLhttp://www.springerlink.com/content/40k5t3073r7n4826/
Language usedEnglish

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