:::
Journal paper
Date of publication2009-04-07
Journal levelSCI
Paper title (chapter)Grain size control of (111) polycrystalline 3C-SiC films by doping used as folded-beam MEMS resonators for energy dissipation
Name of journalMicrosystem Technologies
number of chaptersVol.15
Issue No.No.6
起頁875
迄頁880
Total number of pages6
Name of author (Chinese)Wen-Teng Chang
Name of author (English)Wen-Teng Chang
AuthorsWenteng Chang, Christian Zorman
Number of authors2
Author's typeFirst Author / Corresponding Author
ISSN(ISBN)1432-1858
Reference URLhttp://www.springerlink.com/content/40k5t3073r7n4826/
Language usedEnglish

Calendar

« November 2019»
Mon.Tue.Wed.Thu.Fri.Sat.Sun.
    010203
04050607080910
11121314151617
18192021222324
252627282930
Decorative image

Decorative image

Decorative image

Gallery

Decorative imageDecorative imageDecorative imageDecorative imageDecorative imageDecorative imageDecorative imageDecorative imageDecorative imageDecorative imageDecorative imageDecorative image
Read more
cron web_use_log