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Seminar paper
Year2006
Paper type其他
Paper level其他
Paper title (chapter)Device Mobility Enhancement for 65nm FUSI CMOSFETs using a Second CESL Process
Name of conferenceIEEE Proceedings of IEDMS
Name of author (Chinese)Wen-Kuan Yeh
Name of author (English)Wen-Kuan Yeh
AuthorsChieh-Ming Lai, Wen-Kuan Yeh, Chien-Ting Lin, Yean-Kuen Fang
Number of authors4
Author's typeCorresponding Author
LocationTaiwan
Language usedEnglish

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