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Seminar paper
Year2006
Paper type其他
Paper level其他
Paper title (chapter)An Efficient Mobility Enhancement Engineering on 65nm FUSI CMOSFETs using a Second CESL Process
Name of conferenceSolid-State Device and Materials
Conference starting time2006-09-00
Conference closing time2006-09-00
Name of author (Chinese)Wen-Kuan Yeh
Name of author (English)Wen-Kuan Yeh
AuthorsC. M. Lai, Y. K. Fang, C. T. Lin, W. K. Yeh, C. W. Hsu, C. H. Hsu, L. W. Chen and M. Ma
Number of authors8
Author's typeCorresponding Author
LocationYoKohama, Japan
Language usedEnglish

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