:::
| Year | 2006 |
|---|---|
| Paper type | 其他 |
| Paper level | 其他 |
| Paper title (chapter) | A New concept for Particle removes in Wet Bench Cleaning |
| Name of conference | IEEE Proceedings of IPFA |
| Name of author (Chinese) | Wen-Kuan Yeh |
| Name of author (English) | Wen-Kuan Yeh |
| Authors | Sheng Hsiung Chen, Wen-Kuan Yeh |
| Number of authors | 2 |
| Author's type | Corresponding Author |
| Location | Singapore |
| Language used | English |
