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Seminar paper
Year2006
Paper type其他
Paper level其他
Paper title (chapter)Low temperature pulse laser deposition of aluminate nitride thin film and its characterization
Name of conference2006 OPT
Conference starting time2006-12-15
Conference closing time2006-12-16
Name of author (Chinese)Ming-Chang Shih
Name of author (English)Ming-Chang Shih
AuthorsChi Wei Liang, Ming Chang Shih, Cheng En Ho, Chieh Tun Chuang, and Wen Ho Lan
Number of authors5
Author's typeCorresponding Author
LocationTaiwan
Language usedEnglish

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