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Seminar paper
Year2006
Paper type其他
Paper level其他
Paper title (chapter)Pulse laser deposition of AlN thin film at low substrate temperature
Name of conferenceInternational Conference on Microelectronics and Interfaces(AVS ICMI’2006)
Conference starting time2006-03-07
Conference closing time2006-03-09
Name of author (Chinese)Ming-Chang Shih
Name of author (English)Ming-Chang Shih
AuthorsM. C. Shih, Chi-Wei Liang, and W.H. Lan
Number of authors3
Author's typeFirst Author
LocationAustin, Texas, U.S.A.
Language usedEnglish

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