:::
Seminar paper
Year2006
Paper type其他
Paper level其他
Paper title (chapter)Electrical properties of DC sputtering AlN/Si capacitors with different substrate temperatures
Name of conferenceInternational Conference on Microelectronics and Interfaces(AVS ICMI’2006)
Conference starting time2006-03-07
Conference closing time2006-03-09
Name of author (Chinese)Ming-Chang Shih
Name of author (English)Ming-Chang Shih
AuthorsRu-Yuan Yang, Han-Ding Hsueh, Yan-Kuin Su, Min-Hang Weng and Ming-Chang Shih
Number of authors5
Author's typeCorresponding Author
LocationAustin, Texas, U.S.A.
Language usedEnglish

Calendar

« February 2020»
Mon.Tue.Wed.Thu.Fri.Sat.Sun.
     0102
03040506070809
10111213141516
17181920212223
242526272829
Decorative image

Decorative image

Decorative image

Gallery

Decorative imageDecorative imageDecorative imageDecorative imageDecorative imageDecorative imageDecorative imageDecorative imageDecorative imageDecorative imageDecorative imageDecorative image
Read more
cron web_use_log