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Seminar paper
Year2005
Paper type其他
Paper level其他
Paper title (chapter)Aln Thin Film Deposition by 248 nm Pulse Laser at Low Substrate Temperature
Name of conference2005台灣光電科技研討會(OPT2005)
Conference starting time2005-12-08
Conference closing time2005-12-09
Name of author (Chinese)Ming-Chang Shih
Name of author (English)Ming-Chang Shih
AuthorsM. C. Shih, Chi-Wei Liang, and W.H. Lan
Number of authors3
Author's typeFirst Author
LocationTaiwan
Language usedEnglish

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