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Seminar paper
Year2005
Paper type其他
Paper level其他
Paper title (chapter)Low Temperature Excimer Laser Deposition of GaN Thin Film
Name of conferenceSymposium on Nano Device Technology 2005(SNDT 2005)
Conference starting time2005-03-04
Conference closing time2005-03-05
Name of author (Chinese)Ming-Chang Shih
Name of author (English)Ming-Chang Shih
AuthorsM. C. Shih, Chi-Wei Liang, W.H. Lan and T.J. Chung
Number of authors4
Author's typeFirst Author
LocationTaiwan
Language usedEnglish

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