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Seminar paper
Year2011
Paper type海報展示
Paper level其他
Paper title (chapter)UV Pulse Laser Deposition of AlN Thin Films on Si and its Electro-optic Characteristics
Name of conferenceICMAT 2011 International Conference on Materials for Advanced Technologies
Conference starting time2011-06-26
Conference closing time2011-07-01
Name of author (Chinese)Ming-Chang Shih
Name of author (English)Ming-Chang Shih
AuthorsMing Chang Shih *, C. S. Chen, Y. C. Sun, U. Y. Lin, J. H. Hong, and W. H. Lan
Number of authors6
Author's typeFirst Author
LocationSingapore
Language usedEnglish

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