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Seminar paper
Year2013
Paper type口頭報告 / 會議論文
Paper level其他
Paper title (chapter)Reliability of Doping Concentration in Ultra-Thin-Body and Buried Oxide Silicon on Insulator
Name of conferenceInternational Electron Devices and Materials Symposium (IEDMS)
Conference starting time2013-11-28
Conference closing time2013-11-29
Name of author (Chinese)Wen-Teng Chang
Name of author (English)Wen-Teng Chang
AuthorsWen-Teng Chang, Chun-Ming Lai, and Wen-Kuan Yeh
Number of authors3
Author's typeFirst Author / Corresponding Author
LocationNantou, Taiwan

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