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Seminar paper
Year2014
Paper type會議論文
Paper level其他
Paper title (chapter)Interface State Related to Transconductance on Channel Length of Contact Etch Stop Layer with Mechanical Stress
Name of conferenceInternational Electron Devices and Materials Symposium
Conference starting time2014-11-20
Conference closing time2014-11-21
Name of author (Chinese)Wen-Teng Chang
Name of author (English)Wen-Teng Chang
AuthorsPin-Hung Kuo (郭品宏), Yu-Yen Ho(何俞彥), Wen-Teng Chang
Number of authors3
Author's typeCorresponding Author
LocationHualien, Taiwan

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