:::
| Year | 2014 |
|---|---|
| Paper type | 會議論文 |
| Paper level | 其他 |
| Paper title (chapter) | Interface State Related to Transconductance on Channel Length of Contact Etch Stop Layer with Mechanical Stress |
| Name of conference | International Electron Devices and Materials Symposium |
| Conference starting time | 2014-11-20 |
| Conference closing time | 2014-11-21 |
| Name of author (Chinese) | Wen-Teng Chang |
| Name of author (English) | Wen-Teng Chang |
| Authors | Pin-Hung Kuo (郭品宏), Yu-Yen Ho(何俞彥), Wen-Teng Chang |
| Number of authors | 3 |
| Author's type | Corresponding Author |
| Location | Hualien, Taiwan |
