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Year | 2014 |
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Paper type | 會議論文 |
Paper level | 其他 |
Paper title (chapter) | Interface State Related to Transconductance on Channel Length of Contact Etch Stop Layer with Mechanical Stress |
Name of conference | International Electron Devices and Materials Symposium |
Conference starting time | 2014-11-20 |
Conference closing time | 2014-11-21 |
Name of author (Chinese) | Wen-Teng Chang |
Name of author (English) | Wen-Teng Chang |
Authors | Pin-Hung Kuo (郭品宏), Yu-Yen Ho(何俞彥), Wen-Teng Chang |
Number of authors | 3 |
Author's type | Corresponding Author |
Location | Hualien, Taiwan |