:::
| Year | 2015 |
|---|---|
| Paper type | 口頭報告 / 會議論文 |
| Paper level | 其他 |
| Paper title (chapter) | Achieving a high efficiency “anhydrous” etch process for separating III-V thin film |
| Name of conference | TACT2015 International Thin Films Conference |
| Conference starting time | 2015-11-15 |
| Conference closing time | 2015-11-18 |
| Name of author (Chinese) | (David) Jui-Yang, Feng |
| Name of author (English) | (David) Jui-Yang, Feng |
| Authors | David Jui-Yang Feng*, Heng Kuo(郭衡), Tai-Chun Liao(廖泰鈞) and Te-Hui Wang(王德輝) |
| Number of authors | 4 |
| Author's type | First Author / Corresponding Author |
| Location | Tainan, Taiwan |
| Language used | English |
| Associated project name | MOST 103-2221-E-390 -008 |
