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Seminar paper
Year2015
Paper type口頭報告 / 會議論文
Paper level其他
Paper title (chapter)Achieving a high efficiency “anhydrous” etch process for separating III-V thin film
Name of conferenceTACT2015 International Thin Films Conference
Conference starting time2015-11-15
Conference closing time2015-11-18
Name of author (Chinese)(David) Jui-Yang, Feng
Name of author (English)(David) Jui-Yang, Feng
AuthorsDavid Jui-Yang Feng*, Heng Kuo(郭衡), Tai-Chun Liao(廖泰鈞) and Te-Hui Wang(王德輝)
Number of authors4
Author's typeFirst Author / Corresponding Author
LocationTainan, Taiwan
Language usedEnglish
Associated project nameMOST 103-2221-E-390 -008

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