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Seminar paper
Year2016
Paper type會議論文 / 壁報論文
Paper level其他
Paper title (chapter)Achieving High Efficient “Dry” Epitaxial Lift-Off Process by Using HF-Etchant Mixed in Supercritical CO2
Name of conference18th International Conference on Metal Organic Vapor Phase Epitaxy
Conference starting time2016-07-10
Conference closing time2016-07-15
Name of author (Chinese)(David) Jui-Yang, Feng
Name of author (English)(David) Jui-Yang, Feng
AuthorsDavid Jui-Yang Feng, Heng Kuo (郭 衡)
Number of authors2
Author's typeFirst Author / Corresponding Author
LocationSan Diego, California, USA
sponsorMaterials Research Society, MRS
Reference URLhttp://www.mrs.org/icmovpe-xviii/
Language usedEnglish

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