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Seminar paper
Year2016
Paper type口頭報告 / 會議論文
Paper level其他
Paper title (chapter)利用超臨界二氧化碳攜帶氫氟酸開發磊晶薄膜之高效蝕刻剝離技術
Name of conference15th Symposium on Development of Supercritical Fluid Technology and Application, incorporating with the 4th Cross- Strait Symposium on Supercritical Fluid Technology
Conference starting time2016-09-08
Conference closing time2016-09-10
Name of author (Chinese)(David) Jui-Yang, Feng
Name of author (English)(David) Jui-Yang, Feng
Authors郭衡﹑廖泰鈞﹑馮瑞陽*
Number of authors3
Author's typeCorresponding Author
LocationKaohsiung, Taiwan (論文優良獎)
sponsorTaiwan Supercritical Fluid Association (TSCFA) and Metal Industries Research & Development Centre (MIRDC)
Note論文優良獎

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