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Seminar paper
Year2016
Paper type口頭報告 / 會議論文 / 受邀演講
Paper level其他
Paper title (chapter)Demonstration of Lift-off Si-Nanomembrane by Using HF-Etchant Mixed in supercritical CO2
Name of conferenceThe 11th National Symposium on Supercritical Fluids
Conference starting time2016-11-04
Conference closing time2016-11-06
Name of author (Chinese)(David) Jui-Yang, Feng
Name of author (English)(David) Jui-Yang, Feng
AuthorsTai-Chun Liao (廖泰鈞), Heng Kuo (郭橫), Te-Hui Wang (王德輝), Wen-Ling Lee (李玟伶), Wen-How Lan, Yi-Jen Chiu, Yung-Jr Hung and David Jui-Yang Feng*
Number of authors8
Author's typeCorresponding Author
LocationXiamen, China
Language usedEnglish

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