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Seminar paper
Year2017
Paper type會議論文 / 壁報論文
Paper level其他
Paper title (chapter)開發抗HF/H2O2混合液之超臨界CO2系統發展矽高深寬比蝕刻製程
Name of conference第十六屆超臨界流體技術應用與發展研討會
Conference starting time2017-10-20
Conference closing time2017-10-21
Name of author (Chinese)(David) Jui-Yang, Feng
Name of author (English)(David) Jui-Yang, Feng
Authors李玟怜﹑馮瑞陽*﹑藍文厚﹑許富傑﹑洪勇智﹑邱逸仁
Number of authors6
Author's typeCorresponding Author
Location台中,台灣
Language usedChinese

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