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Seminar paper
Year2017
Paper type口頭報告 / 會議論文
Paper level其他
Paper title (chapter)Developing high corrosion-resistance system for operating HF-etchant mixed in supercritical CO2 to apply in lift-off Si-nanomembrane
Name of conferenceSupergreen 2017, the 10th International Conference on Supercritical Fluids
Conference starting time2017-12-01
Conference closing time2017-12-03
Name of author (Chinese)(David) Jui-Yang, Feng
Name of author (English)(David) Jui-Yang, Feng
AuthorsDavid Jui-Yang Feng*, Te-Hui Wang, Wen-Ling Lee (李玟怜), Tai-Chun Liao, Heng Kuo, Wen-How Lan, Yung-Jr Hung and Yi-Jen Chiu
Number of authors8
Author's typeFirst Author / Corresponding Author
LocationNagoya, Japan
Language usedEnglish

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