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Seminar paper
Year2010
Paper type會議論文 / 其他
Paper level其他
Paper title (chapter)External Compressive Stresses on Gate Capping Layer of Partially Depleted Silicon-on-Insulator MOSFETs
Name of conference16th Workshop on Dielectric Materials (WoDiM)
Conference starting time2010-06-28
Conference closing time2010-06-30
Name of author (Chinese)Wen-Teng Chang
Name of author (English)Wen-Teng Chang
AuthorsWen-Teng Chang, Jian-An Lin, Chih-Chung Wang, Wen-Kuan Yeh
Number of authors4
Author's typeFirst Author
Language usedEnglish

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