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Year | 2007 |
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Paper type | 會議論文 / 其他 |
Paper level | EI |
Paper title (chapter) | Modeling of Feedthrough Capacitance for MEMS Folded-Beam Silicon Carbide Resonators |
Name of conference | IEEE International Conference on Electron Devices and Solid-State Circuits |
Conference starting time | 2007-12-20 |
Conference closing time | 2007-12-22 |
Name of author (Chinese) | Wen-Teng Chang |
Name of author (English) | Wen-Teng Chang |
Authors | W. T. Chang |
Number of authors | 1 |
Author's type | First Author |
Location | Tainan, Taiwan |
Language used | English |