:::
| Year | 2007 |
|---|---|
| Paper type | 會議論文 / 其他 |
| Paper level | EI |
| Paper title (chapter) | Modeling of Feedthrough Capacitance for MEMS Folded-Beam Silicon Carbide Resonators |
| Name of conference | IEEE International Conference on Electron Devices and Solid-State Circuits |
| Conference starting time | 2007-12-20 |
| Conference closing time | 2007-12-22 |
| Name of author (Chinese) | Wen-Teng Chang |
| Name of author (English) | Wen-Teng Chang |
| Authors | W. T. Chang |
| Number of authors | 1 |
| Author's type | First Author |
| Location | Tainan, Taiwan |
| Language used | English |
