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Seminar paper
Year2007
Paper type會議論文 / 其他
Paper levelEI
Paper title (chapter)Modeling of Feedthrough Capacitance for MEMS Folded-Beam Silicon Carbide Resonators
Name of conference IEEE International Conference on Electron Devices and Solid-State Circuits
Conference starting time2007-12-20
Conference closing time2007-12-22
Name of author (Chinese)Wen-Teng Chang
Name of author (English)Wen-Teng Chang
AuthorsW. T. Chang
Number of authors1
Author's typeFirst Author
LocationTainan, Taiwan
Language usedEnglish

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