計畫名稱：半導體微型雷射陀螺儀的製作及其輸出特性量測研究
執行起迄：2016/08/01~2017/07/31
總核定金額：820,000元
中文摘要：本計畫是利用環型共振腔正/反方向的光束因光介質的相對運動所造成之頻率漂移現象，以做為發展半導體微型光陀螺儀元件之基礎，本計畫完成不同半徑晶片式環型雷射陀螺儀元件的製作，並進一步由實驗量測雷射陀螺儀拍頻信號計算與實際地球自轉角速度驗證，小半徑(R=100)的環型雷射陀螺儀得到比較接近地球自轉速度，小微型雷射陀螺儀元件技術可以有助於我國發展光電半導體產業及飛航器件的慣性導航技術與發展智慧型機器人所需的微型化角度感測關鍵元件技術，同時也可以提供研究生在光學陀螺儀技術領域的創新研究課題。
英文摘要：Gyroscope is an important key component in inertial control for aviation and robotics system. Compare to mechanical gyroscope, optical gyroscope is intrinsically frictionless that makes high accuracy of angular sensing without causing signal drift during long time measurement. The objective of this research is to fabricate a semiconductor micro-chip size gyroscope device by applying the Sagnac frequency shifting effect to generate beating in a semiconductor circular ring resonator due to the rotation of the resonator itself. Measurements of beating of the output of the micro gyroscope with different radius of the ring resonator have been tested under the rotational speed of the earth are presented. It showed that the calculated angular velocity of the micro gyroscope device of diameters R=100 um was considerably close to the actual rotational speed of the earth. The achievement in this project will provide an essential contribution to the development for semiconductor opto-electronic technology, and also provides an innovative educational experience for graduated students in exploring valuable knowledge of this novel gyroscope devices.