Jump to the main content block

 

"High Gamma Value 3D-Stackable HK/MG-Stacked Tri-Gate Nanowire Poly-Si FETs With Embedded Source/Drain and Back Gate Using Low Thermal Budget Green Nanosecond Laser Crystallization Technology"

  • 出版日期:2016-03-00
  • 期刊等級:SCI
  • 論文名稱(篇名):High Gamma Value 3D-Stackable HK/MG-Stacked Tri-Gate Nanowire Poly-Si FETs With Embedded Source/Drain and Back Gate Using Low Thermal Budget Green Nanosecond Laser Crystallization Technology
  • 期刊名:IEEE Electron Device Letters
  • 卷數:37
  • 期數:5
  • 起頁:533
  • 迄頁:536
  • 總頁數:4
  • 作者中文名:葉文冠
  • 作者英文名: Wen-Kuan Yeh
  • 全部作者:Chih-Chao Yang; W. -H. Huang; T. -Y. Hsieh; Tsung-Ta Wu; Hsing-Hsiang Wang; Chang-Hong Shen; Wen-Kuan Yeh; Jung-Hau Shiu; Yu-Hsiu Chen; Meng-Chyi Wu; Jia-Min Shieh
  • 著作人數:11
  • 作者型態:Other
  • Click Num:
    Login Success