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"Reliability Improvement of 28-nm High-k/Metal Gate-Last MOSFET Using Appropriate Oxygen Annealing" , IEEE ELECTRON DEVICE LETTERS , 33 , 8 , pp1183-1185 ,2012, (SCI)

  • 出版日期:2012-08-00
  • 期刊等級:SCI
  • 論文名稱(篇名):Reliability Improvement of 28-nm High-k/Metal Gate-Last MOSFET Using Appropriate Oxygen Annealing
  • 期刊名:IEEE ELECTRON DEVICE LETTERS
  • 卷數:33
  • 期數:8
  • 起頁:1183
  • 迄頁:1185
  • 作者中文名:葉文冠
  • 作者英文名: Wen-Kuan Yeh
  • 全部作者:CYi-Lin Yang, Wenqi Zhang, Chi-Yun Cheng, Yi-Ping Huang, Pin-Tseng Chen, Chia-Wei Hsu, Li-Kong Chin, Chien-Ting Lin, Che-Hua Hsu, Chien-Ming Lai, and Wen-Kuan Yeh
  • 著作人數:11
  • 作者型態:Other
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