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Effects of deposition parameters on properties of high resistance CrSi-based thin-film resistors

Hsien-Wei Tseng, David Jui-Yang Feng*, Chi-Lun Li, and Cheng-Fu Yang*, “Effects of deposition parameters on properties of high resistance CrSi-based thin-film resistors,” International Journal of Modern Physics B, Vol. 35, No. 3, 2150040, Jan. (2021)
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